Geometric factors affecting growth rate in oblique angle deposition

Geometric factors affecting growth rate in oblique angle deposition

Vyas, Garima

Electrical engineering

December 2007

School of Engineering

Rensselaer Polytechnic Institute, Troy, NY

Schubert, E. Fred

Kim, Jong Kyu

Siegel, R. W. (Richard W.)

2007-12

Electronic thesis

ENG

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