CVD Parylene-N as pore sealant for porous low-κ dielectrics

CVD Parylene-N as pore sealant for porous low-κ dielectrics

Juneja, Jasbir S.

Chemical and biological engineering

December 2006

School of Engineering

Rensselaer Polytechnic Institute, Troy, NY

Lu, T.-M. (Toh-Ming), 1943-

Bakhru, Hassaram

Plawsky, Joel L., 1957-

Kane, Ravi S.

Bhat, Iahwara B.

2006-12

Electronic thesis

ENG

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