4H-SiC lateral MOSFETs on (0001), (000-1) and (11-20) oriented SiC substrates

4H-SiC lateral MOSFETs on (0001), (000-1) and (11-20) oriented SiC substrates

Naik Harsh

Electrical engineering

August 2009

School of Engineering

Center for Integrated Electronics

Rensselaer Polytechnic Institute, Troy, NY

Chow, Tat-Sing Paul

2009-08

Electronic thesis

ENG

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