Selective epitaxial growth of 4H-SiC and its applications for power devices

Selective epitaxial growth of 4H-SiC and its applications for power devices

Li, Canhua

Electrical, computer, and systems engineering

December 2006

School of Engineering

Rensselaer Polytechnic Institute, Troy, NY

Bhat, Ishwara B.

Chow, T. Paul

Lu, T.-M. (Toh-Ming), 1943-

Schubert, E. Fred

2006-12

Electronic thesis

ENG

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