Recovery of crystalline and optoelectronic properties in Si(100) after focused ion beam implantation of Ga+ and annealing

Recovery of crystalline and optoelectronic properties in Si(100) after focused ion beam implantation of Ga+ and annealing

Bearup, Delia Rose

Materials science and engineering

August 2009

School of Engineering

Rensselaer Polytechnic Institute, Troy, NY

Hull, Robert, 1959-

2009-08

Electronic thesis

ENG

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