Physical-chemical interactions at metal/low-k dielectric interfaces

Physical-chemical interactions at metal/low-k dielectric interfaces

Achanta, Ravi S.

Chemical and biological engineering

May 2008

School of Engineering

Rensselaer Polytechnic Institute, Troy, NY

Plawsky, Joel L., 1957-

Gill, William N

Martin, Lealon L.

Gall, Daniel

Borca-Tasçiuc, Theodorian

2008-05

Electronic thesis

ENG

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