Atomic layer deposition of metals on dielectric substrates

Atomic layer deposition of metals on dielectric substrates

Ten Eyck, Gregory A.

Electrical engineering

May 2007

School of Engineering

Rensselaer Polytechnic Institute, Troy, NY

Lu, T.-M. (Toh-Ming), 1943-

Bhat, Iahwara B.

Shur, Michael

Dutta, Partha S.

2007-05

Electronic thesis

ENG

This electronic version is a licensed copy owned by Rensselaer Polytechnic Institute, Troy, NY. Copyright of original work retained by author.

Restricted to current Rensselaer faculty, staff and students. Access inquiries may be directed to the Rensselaer Research Libraries.